A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULE® Surfaces
نویسندگان
چکیده
منابع مشابه
Ultra-precision Machining Systems; an Enabling Technology for Perfect Surfaces
The technology of ultra-precision machining, spanning almost three decades, has only in recent years experienced major advances in machine design and, subsequently, performance and productivity. In the 1970’s, ultra-precision machining techniques were successfully adopted for the manufacture of computer memory discs used in hard drives, and also photoreceptor components used in many photocopier...
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چکیده ندارد.
15 صفحه اولPrecision Science and Technology for Perfect Surfaces
Aspheric mirrors for extreme ultraviolet lithography (EUVL) at a wavelength of 13nm require surface figure accuracy approaching 0.10nm rms. A new type of interferometry, based on the fundamental process of diffraction, is described that has the intrinsically ability to achieve this accuracy on aspherical surfaces. However, care must be taken in the design and implementation of the optical syste...
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ژورنال
عنوان ژورنال: Advanced Engineering Materials
سال: 2006
ISSN: 1438-1656,1527-2648
DOI: 10.1002/adem.200600028